How to kill zombie process

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I launched my program in the foreground (a daemon program), and then I killed it with kill -9, but I get a zombie remaining and I m not able to kill it with kill -9. How to kill a zombie process?

If the zombie is a dead process (already killed), how I remove it from the output of ps aux?

root@OpenWrt:~# anyprogramd &
root@OpenWrt:~# ps aux | grep anyprogram
 1163 root      2552 S    anyprogramd
 1167 root      2552 S    anyprogramd
 1169 root      2552 S    anyprogramd
 1170 root      2552 S    anyprogramd
10101 root       944 S    grep anyprogram
root@OpenWrt:~# pidof anyprogramd
1170 1169 1167 1163
root@OpenWrt:~# kill -9 1170 1169 1167 1163
root@OpenWrt:~# ps aux |grep anyprogram
 1163 root         0 Z    [anyprogramd]
root@OpenWrt:~# kill -9 1163
root@OpenWrt:~# ps aux |grep anyprogram
 1163 root         0 Z    [anyprogramd]

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